Methods and apparatus for depositing barrier coatings

Details Methods and apparatus for depositing barrier coatings Methods and apparatus for depositing barrier coatings

C - Chemistry, Metallurgy

23

C

C23C 16/50 (2006.01) B05D 7/24 (2006.01) C23C 4/10 (2006.01) C23C 16/04 (2006.01) C23C 16/40 (2006.01) B05D 7/22 (2006.01) C23C 16/44 (2006.01)

Patent

CA 2112102

A barrier coating is formed on a polymeric article (B,C), such as on the interior of a thermoplastic container. An oxidizing gas (70) is converted to a plasma in a plasma chamber (46) remote from the treatment chamber (32). The resulting plasma-activated oxidizing species are delivered to the interior (40) of the container. An organosilicon reactant vapor (76) is separately but simultaneously delivered to the interior (40) of the container so that the organosilicon vapor and oxidizing active species mix within the container. An electric field (42, 44) is also applied to the container, so that the reaction products are deposited under the influence of the electric field to form the barrier coating.

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