G - Physics – 01 – C
Patent
G - Physics
01
C
G01C 19/56 (2006.01)
Patent
CA 2515300
A method for providing micro-electromechanical systems (MEMS) devices (10) with multiple motor frequencies and uniform motor-sense frequency separation is described. The devices each include at least one proof mass (12, 13), each proof mass being connected to a substrate by a system of suspensions (14). The method includes controlling the resonant frequencies of the MEMS device by adjusting at least two of a mass of the proof masses, a bending stiffness of the proof masses, a length of the suspensions, and a width of the suspensions.
L'invention concerne un procédé permettant d'obtenir des dispositifs microélectromécaniques (MEMS) (10) avec de multiples fréquences de moteur et une séparation de fréquence de sens du moteur uniforme. Ces dispositifs comprennent chacun au moins une masse d'épreuve (12, 13), chaque masse d'épreuve étant reliée à un substrat par un système de suspensions (14). Ce procédé consiste entre autre à commander les fréquences de résonances du dispositif MEMS par réglage d'au moins deux éléments parmi une des masses d'épreuve, une résistance à la flexion des masses d'épreuve, et une largeur des suspensions.
Arch David K.
Glenn Max C.
Johnson Burgess R.
Platt William P.
Weber Mark W.
Gowling Lafleur Henderson Llp
Honeywell International Inc.
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