Methods for deposition of low resistivity semiconductors and...

Details Methods for deposition of low resistivity semiconductors and... Methods for deposition of low resistivity semiconductors and...

H - Electricity

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L

H01L 21/288 (2006.01) H01L 31/0296 (2006.01) H01L 31/0336 (2006.01) H01L 31/18 (2006.01)

Patent

CA 2093707

METHODS FOR DEPOSITION OF LOW RESISTIVITY SEMICONDUCTORS AND FABRICATION OF SOLAR CELLS ABSTRACT OF THE DISCLOSURE The present invention describes a method of deposit- ing low resistivity CdS, ZnS and ZnSe thin films for elec- tronic device applications. The CdS, ZnS or ZnSe films are deposited respectively from electrolytes containing ions of Cd and S, Zn and S, or Zn and Se. The resistivity of the deposited thin films is controlled by adding impurities in the electrolyte and carrying out co-deposition. A method for the fabrication of thin film solar cells using elec- trodeposition is also given.

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