H - Electricity – 01 – L
Patent
H - Electricity
01
L
H01L 21/02 (2006.01)
Patent
CA 2549341
The presently disclosed subject matter describes the use of fluorinated elastomer-based materials, in particular perfluoropolyether (PFPE)-based materials, in high-resolution soft or imprint lithographic applications, such as micro- and nanoscale replica molding, and the first nano-contact molding of organic materials to generate high fidelity features using an elastomeric mold. Accordingly, the presently disclosed subject matter describes a method for producing free-standing, isolated nanostructures of any shape using soft or imprint lithography techniques.
La présente invention a trait à l'utilisation de matériaux à base d'élastomère fluoré, notamment des matériaux à base de polyéther perfluoré, dans des applications lithographiques molle ou d'impression haute résolution, telles que le moulage de répliques à l'échelle micronique ou nanométrique, et le moulage par premier contact à l'échelle nanométrique de matériaux organiques pour la génération d'éléments de haute fidélité au moyen d'un moule élastomérique. Par conséquent, la présente invention a trait à un procédé pour la production de nanostructures isolées autoportantes de toute forme au moyen de techniques de lithographie molle ou d'impression.
Denison Ginger M.
Desimone Joseph M.
Euliss Larken E.
Exner Ansley E.
Maynor Benjamin W.
North Carolina State University
Norton Rose Or S.e.n.c.r.l.,s.r.l./llp
The University Of North Carolina At Chapel Hill
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