Methods for forming semiconductor waveguide devices

Details Methods for forming semiconductor waveguide devices Methods for forming semiconductor waveguide devices

H - Electricity

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L

356/178, 345/31.

H01L 21/20 (2006.01) G02B 6/122 (2006.01) H01L 21/208 (2006.01)

Patent

CA 1070029

METHODS FOR FORMING SEMICONDUCTOR WAVEGUIDE DEVICES Abstract of the Disclosure Methods are provided for making buried rib and buried heterostructure waveguides by liquid phase epitaxy, The provision of a groove in -the substrate layer results in the preferential growth of new material without intermediate etching procedures. - 1 -

267912

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