Methods for making millichannel substrate, and cooling...

H - Electricity – 01 – L

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H01L 23/46 (2006.01) B32B 18/00 (2006.01) G12B 15/00 (2006.01) H05K 7/20 (2006.01)

Patent

CA 2695746

A substrate (12) for power electronics (100) mounted thereon, comprises a middle ceramic layer (120) having a lower surface (124) and an upper surface (123), an upper metal layer (121) attached to the upper surface (124) of the middle ceramic layer (120), and a lower metal layer (122) attached to the lower surface (124) of the middle ceramic layer (120). The lower metal layer (122) has a plurality of millichannels (125, 126) configured to deliver a coolant for cooling the power electronics (100), wherein the millichannels (125, 126) are formed on the lower metal layer (122) prior to attachment to the lower surface (124) of the middle ceramic layer (120). Methods for making a cooling device and an apparatus (10) are also presented.

Substrat (12)pour dispositifs électroniques de puissance (100) montés sur ledit substrat, comprenant une couche centrale de céramique(120) comportant une surface inférieure (124) et une surface supérieure (123), une couche métallique supérieure (121) fixée à la surface supérieure (124) de la couche de céramique centrale (120) et une couche métallique inférieure (122) fixée à la surface inférieure (124) de la couche de céramique centrale (120). La couche métallique inférieure (122) comporte une série de millicanaux (125, 126) configurés de façon à acheminer un liquide de refroidissement pour les dispositifs électroniques de puissance (100), où les millicanaux (125, 126) sont formées sur la couche métallique inférieure (122) avant sa fixation à la surface inférieure (124) de la couche de céramique centrale (120). L'invention présente également des méthodes de fabrication d'un dispositif de refroidissement et d'un appareil (10).

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