H - Electricity – 01 – L
Patent
H - Electricity
01
L
H01L 45/00 (2006.01) B81B 3/00 (2006.01) H01L 21/768 (2006.01) H01L 27/24 (2006.01) H01L 51/40 (2006.01)
Patent
CA 2471380
Methods of producing an electromechanical circuit element are described. A lower structure (103) having lower support structures and a lower electrically conductive element is provided. A nanotube ribbon (10) (or other electromechanically responsive element) is formed on an upper surface of the lower structure (103) so as to contact the lower support structures. An upper structure (102) is provided over the nanotube ribbon (101). The upper structure (102) includes upper support structures and an upper electrically conductive element. In some arrangements, the upper and lower electrically conductive elements are in vertical alignment, but in some arrangements they are not.
La présente invention concerne des procédés permettant la production d'un élément de circuit électromécanique. Il est prévu ne structure inférieure (103) comportant des structures de support inférieures et un élément conducteur d'électricité. Un ruban de nanotube (101) (ou tout autre élément à sensibilité électromécanique) est formé à la surface supérieure de la structure inférieure (103) pour être en contact avec les structures de support inférieures. Une structure supérieure (102) est prévue au-dessus du ruban de nanotube (101). La structure supérieure (102) comporte des structures de support supérieures et un élément conducteur d'électricité supérieur. Dans certains modes de réalisation, les éléments supérieur et inférieur conducteurs d'électricité sont en alignement vertical, mais pas dans d'autres.
Brock Darren K.
Rueckes Thomas
Segal Brent M.
Nantero Inc.
Smart & Biggar
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