Methods of meniscus coating

Details Methods of meniscus coating Methods of meniscus coating

B - Operations, Transporting

05

D

B05D 1/26 (2006.01) B05C 9/02 (2006.01) B05D 1/28 (2006.01) G03F 7/16 (2006.01)

Patent

CA 2111795

Methods are disclosed for coating flat or curved planar surfaces by flowing a coating material through a porous applicator onto the surface of the object to be coated. Menisci of the coating material are maintained between the porous applicator and the surface of the object to be coated by attractive forces between the coating material and the surface of the object. Thin, uniform coating thicknesses, e.g., less than about 1 micron, and conformal coatings of objects having irregular surfaces can be obtained. The methods are useful, for example, for coating objects such as flat panel displays, optical devices, silicon and germanium wafers, and hybrid circuit boards.

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