Methods to fabricate dense wavelength division multiplexers

Details Methods to fabricate dense wavelength division multiplexers Methods to fabricate dense wavelength division multiplexers

H - Electricity

04

J

H04J 14/02 (2006.01) G02B 6/34 (2006.01) G02B 6/36 (2006.01)

Patent

CA 2199996

Methods for the fabrication of dense wavelength division multiplexers (DWDM) are disclosed. In one embodi- ment, an array of micro membranes and an array of cavities for optical fibers are etched in a substrate. The distance between major surfaces of adjacent micro membranes is con- trolled during the etching step. Multilayer narrow bandpass filters are then deposited on all micro membranes simultaneously by vacuum deposition methods. Due to the controlled separation between adjacent micro membranes, the central wavelength of transmission either increases or decreases from one membrane to another. In another embodi- ment, a micro machined structure containing a plurality of cavities and a slot for a variable narrow band pass filter is fabricated. The variable narrow band pass filter is aligned with respect to the optical fibers to obtain a WDM.

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