Micro-contact-printing engine

Details Micro-contact-printing engine Micro-contact-printing engine

G - Physics

03

F

G03F 9/00 (2006.01) B41F 33/00 (2006.01) B81C 1/00 (2006.01) G03F 1/00 (2006.01) G03F 7/00 (2006.01) H01L 21/48 (2006.01) H01L 21/70 (2006.01)

Patent

CA 2546194

This invention provides a method of accurately aligned, multilevel micro- contact-printing without the need for dedicated inking, alignment and stamping equipment. Die- sized micro-contact-printing engines are constructed from micromachined parts, which combine precision alignment features with stamper blocks supported on elastic suspensions. The stampers carry raised patterns, the alignment features mate with corresponding features on etched inkwells and substrates, and the pattern is transferred using a microactuator.

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