Micro displacement force transducer

Details Micro displacement force transducer Micro displacement force transducer

G - Physics

01

L

73/3

G01L 1/14 (2006.01) G01L 9/00 (2006.01)

Patent

CA 1324496

ABSTRACT A sensor system utilizing a bourdon tube to generate a force as a function of pressure to deflect a diaphragm in a capacitor device where the diaphragm varies capaci- tance values of the capacitor device as a function of the applied force. The capacitor device is an essentially integral circularly shaped construction of quartz material in which the diaphragm is attached to a tubular quartz member. A metal member having a similar coefficient of temperature expansion to the coefficient of the quartz is used to couple the diaphragm to the bourdon tube.

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