G - Physics – 01 – C
Patent
G - Physics
01
C
G01C 19/56 (2006.01) G01P 9/04 (2006.01)
Patent
CA 2753807
The invention relates to an electromechanic microsensor (MEMS) (1) comprising drive elements (2, 3, 4) which are moved linearly in an x-y plane and disposed on a substrate for determining at least two, preferably three, components of the yaw rate vector of the substrate, wherein two groups of drive elements (2, 3; 4) exist, which are driven essentially in directions running essentially at right angles to each other. The electromechanic microsensor (MEMS) (1) according to the invention is characterized in that the drive elements (2, 4; 3, 4) which are moved at right angles to each other are connected to one another for synchronizing the movements by means of a coupling device (6, 7) that is rotatably mounted on the substrate.
L'invention concerne un microcapteur électromécanique (MEMS) (1) comportant des éléments d'entraînement (2, 3, 4) à déplacement linéaire sur un plan x-y, ces éléments étant disposés sur un support pour déterminer au moins deux et de préférence trois composants du vecteur de vitesse de rotation du support, deux groupes d'éléments d'entraînement (2, 3, 4) étant entraînés sensiblement dans des directions orthogonales. Le microcapteur électromécanique (MEMS) (1) de l'invention est caractérisé en ce que les éléments d'entraînement (2, 3, 4) à déplacement orthogonal sont reliés entre eux par un dispositif de couplage (6,7) monté rotatif sur le support et destiné à la synchronisation des déplacements.
Norton Rose Or S.e.n.c.r.l. S.r.l./llp
Sensordynamics Ag
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