Micro-electromechanical pressure sensor

Details Micro-electromechanical pressure sensor Micro-electromechanical pressure sensor

G - Physics

01

L

G01L 9/00 (2006.01) F15C 3/04 (2006.01) G01L 7/08 (2006.01)

Patent

CA 2577343

A pressure sensor (30) for harsh environments such as vehicle tires, the sensor having a chamber (58) partially defined by a flexible membrane (50), the chamber (58) containing a fluid at a reference pressure. In use, the flexible membrane (50) deflects due to pressure differentials between the reference pressure and the fluid pressure, so that, associated circuitry (34) can convert the deflection of the flexible membrane into an output signal indicative of the fluid pressure. The sensor is a MEMS device whereby the recess, the flexible membrane and the associated circuitry are formed using lithographically masked etching and deposition techniques. MEMS fabrication techniques can produce the sensor in such high volumes that the unit cost of each sensor is very low. The MEMS sensor is so small that it can be installed in very restricted areas such as the stem of the tire valve.

L~invention concerne un capteur de pression (30) pour environnements hostiles, comme des pneus de véhicule, le capteur possédant une chambre (58) partiellement définie par une membrane flexible (50), la chambre (58) contenant un fluide à une pression de référence. En service, la membrane flexible (50) subit une flexion provoquée par les différences de pressions entre la pression de référence et la pression de fluide, de sorte que des circuits associés (34) peuvent convertir la flexion de la membrane flexible en signal de sortie indicatif de la pression de fluide. Le capteur est un dispositif MEMS, l'évidement, la membrane flexible et les circuits associés étant formés selon des techniques d'attaque chimique et de déposition à masque de type lithographique. Les techniques de fabrication MEMS permettent de produire le capteur à des volumes si élevés que le coût unitaire de chaque capteur est très faible. Le capteur MEMS est si petit qu~on peut l~installer dans des endroits très restreints, comme la tige de valve d~un pneu.

Affiliated with

Also associated with

Rating

Micro-electromechanical pressure sensor does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Micro-electromechanical pressure sensor, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Micro-electromechanical pressure sensor will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFCA-PAI-O-1896491