G - Physics – 01 – P
Patent
G - Physics
01
P
73/12, 356/200
G01P 15/08 (2006.01) F16F 15/073 (2006.01) G01P 15/13 (2006.01)
Patent
CA 1334798
A spring-mass-support structure and associated electrical circuitry for measuring acceleration applied to the support of the structure is disclosed. According to one aspect of the invention, the spring-mass-support structure of the transducer is fabricated using micro-machining techniques of a silicon wafer. The structure includes E-shaped leaf springs of silicon dioxide which suspend a mass from a support structure. The springs as well as the support structure and the suspended mass, are formed by chemical etching through openings of opposite faces of a silicon wafer on which etch stop layer patterns are diffused. Sense and force conductive patterns are diffused onto the opposite faces of the suspended mass. The spring-mass-support structure is then sandwiched between opposite plates having corresponding sense and force conductive patterns which face such patterns on the suspended mass. According to another aspect of the invention, electrical circuitry is provided by which a sense voltage and a force voltage are applied between opposite sense and force conductive patterns of the opposite plates creating a sense electric field and a force electric field across the sense and force patterns of the mass. A feedback circuit arrangement is provided to substantially maintain the mass at a predetermined reference position between the support plates. Forward circuitry of the feedback arrangement produces a displacement signal in response to a voltage induced on the sense area of the mass as it moves in response to acceleration applied to the support structure. Feedback circuitry of the feedback arrangement produces an amount of charge in response to the displacement signal which is applied to the force conducting area of the mass. The force on said mass is proportional to the product of that charge and the force electric field intensity which causes the mass to remain close to a reference position between the plates. Alternative circuitry for providing analog or binary bit stream representations of acceleration is disclosed.
603258
Finlayson & Singlehurst
I/o Sensors Inc.
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