Micro-machined accelerometer with tilt compensation

Details Micro-machined accelerometer with tilt compensation Micro-machined accelerometer with tilt compensation

G - Physics

01

P

G01P 15/13 (2006.01) G01P 15/08 (2006.01) G01S 5/18 (2006.01)

Patent

CA 2064213

A spring-mass-support structure (36') is arranged as an accelerometer with two electrostatic feedback loops so as to mea- sure two components of acceleration. Two of such accelerometers (1010, 1012) are advantageously used on a submerged platform (1006) to determine the direction of a sound source in a body of water. One of such feedback loops (924, 926, 928, 930, 932) of each accelerometer is used to measure low frequency gravitational acceleration applied to the platform as a result of the tilt of the platform due to the action of current and wave action of the water. The other of the feedback loops (124, 126, 150, 164, 166) of each accelerometer measures sound wave induced acceleration on the platform. The gravitational acceleration of each acceler- ometer is used to compensate the higher frequency acceleration for the effect of tilt of the platform.

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