Micro-machined device for fluids and method of manufacture

Details Micro-machined device for fluids and method of manufacture Micro-machined device for fluids and method of manufacture

F - Mech Eng,Light,Heat,Weapons

15

C

F15C 5/00 (2006.01) F04B 43/04 (2006.01) F04B 53/10 (2006.01)

Patent

CA 2267086

The invention concerns a micro-machined device (10) for fluids comprising a substrate (12) with a flow conduit (14), a thin ductile layer (18) such as a pumping diaphragm or a diaphragm forming a check-valve. The thin layer (18) is a laminated metal sheet, preferably made of titanium and connected to the substrate (12) at the overlapping zone (20) of the flow conduit, by anodic welding. The invention is useful for producing a check-valve.

L'invention concerne un dispositif fluidique (10) micro-usiné comprenant un substrat (12) possédant un conduit d'écoulement (14), une couche mince déformable (18) telle qu'une membrane de pompage ou une membrane constituant un clapet. Selon l'invention, la couche mince (18) est une feuille métallique laminée, de préférence en titane et reliée au substrat (12) au niveau de la zone de recouvrement (20) du conduit d'écoulement, par soudage anodique. L'invention s'applique à la réalisation d'un clapet.

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