Micro-machined mechanical structure and device incorporating...

G - Physics – 01 – P

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G01P 1/00 (2006.01) B81B 3/00 (2006.01) G01P 15/08 (2006.01)

Patent

CA 2344728

A mechanical structure (100) comprises a moving mass (3) suspended by beams (4, 5, 6, 7) from a fixed frame (2). The structure (100) comprises elongation means (23-26) mechanically connected to each of the beams (4, 5, 6, 7). The elongation means is designed such that the stiffness of the beams (4, 5, 6, 7) varies only little during movement of the moving mass. The structure is characterised in that the response of an elongation means is asymmetric when acting in tension and in compression. The structure is thus made insensitive to accelerations along a direction parallel to the suspension direction.

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