Micro-mechanical accelerometers with improved detection...

Details Micro-mechanical accelerometers with improved detection... Micro-mechanical accelerometers with improved detection...

G - Physics

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P

G01P 15/08 (2006.01) C04B 33/13 (2006.01) G01P 15/093 (2006.01) G01P 15/125 (2006.01) G01P 15/13 (2006.01) H01L 21/64 (2006.01)

Patent

CA 2149933

An apparatus for measuring acceleration using micro- mechanical elements (20, 30, 60, 70, 120). One embodiment has one or more acceleration elements (10) wherein each element includes a mass (12) suspended at the ends thereof with a flexible hinge ( 13). The mass (12) may deflect in a first and second rotational direction about an axis in response to acceleration. Each element (10) further has electrodes (15) operable to sense deflection of the mass (12) when the mass (12) is deflected in either direction. Detection circuits (25, 65, 125) operate differently depending on whether the deflection is contacting, non- contacting, or feedback.

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