Micro mechanical component and production process thereof

Details Micro mechanical component and production process thereof Micro mechanical component and production process thereof

H - Electricity

01

L

H01L 21/62 (2006.01) B81B 3/00 (2006.01) C30B 23/02 (2006.01) G01H 3/08 (2006.01) G01H 11/00 (2006.01) G01H 11/06 (2006.01) G01P 15/08 (2006.01) H01L 21/20 (2006.01)

Patent

CA 2145331

A micro mechanical component of the present invention comprises a base, and at least one drive portion supported on the base and relatively driving to the base, in which the drive portion is formed from a diamond layer. Thus, because the drive portion has excellent mechanical strength and modulus of elasticity, the operational performance can be greatly improved as a micro mechanical component processed in a fine shape, from the conventional level. Further, because the drive portion exhibits excellent device characteristics under severe circumstances, the range of applications as a micro mechanical component can be widely expanded from the conventional range.

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