Micro-pattern forming apparatus, micro-pattern structure,...

Details Micro-pattern forming apparatus, micro-pattern structure,... Micro-pattern forming apparatus, micro-pattern structure,...

H - Electricity

01

L

H01L 21/308 (2006.01) B81C 1/00 (2006.01) H01L 51/40 (2006.01)

Patent

CA 2558517

There is provided a micro-pattern forming apparatus including an electrospraying part for applying a voltage to a solution containing a sample to electrostatically atomizing the solution; a supporting part (30) for supporting a chip (26), on which the sample in the solution electrostatically atomized by the electrospraying part, is to be deposited; and a fine mask part (24) disposed between the electrospraying part and the supporting part, having a mask pattern for being passed through by the electrostatically atomized solution in order to form a micro-pattern of the sample upon the chip, wherein the mask pattern is made from a photoresist material with concavity and convexity on the side of the supporting part.

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