Microdrive apparatus

B - Operations – Transporting – 25 – J

Patent

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B25J 5/00 (2006.01) B23Q 5/50 (2006.01) B25J 7/00 (2006.01) B25J 9/12 (2006.01) G02B 7/00 (2006.01) H01L 41/09 (2006.01)

Patent

CA 2005028

A microdrive apparatus of a micromanipulator ac- cording to the present invention is such that a piezo- electric/electrostrictive element having an inertial member mounted at its tip is attached to a moving member supported on a frictional surface of a support member, and a miniature instrument for manipulation is attached to the moving member. By applying an electric field to the piezoelectric/electrostrictive element, the minia- ture instrument for manipulation is controlled for fine movement by utilizing this kinetic energy, the inertial effect of the inertial member, and the reaction force acting upon the moving member. In addition, the minia- ture instrument for manipulation can be controlled to assume a predetermined position and predetermined atti- tude by a micropositioning device having an articulated portion in which an inertial member is attached to an arm via a piezoelectric/electrostrictive element.

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