Microelectromechanical device with optical function...

Details Microelectromechanical device with optical function... Microelectromechanical device with optical function...

G - Physics

02

B

G02B 26/00 (2006.01) B81B 3/00 (2006.01)

Patent

CA 2691674

A microelectromechanical (MEMS) device (800) comprises a substrate (20) having a top surface (88), a movable element (810) over the substrate (20), and an actuation electrode (82). The movable element (810) comprises a deformable layer (34) and a reflective element (814) mechanically coupled to the deformable layer (34). The reflective element (814) includes a reflective surface (92). The actuation electrode (82) is disposed laterally from the reflective surface (92). The movable element (810) is responsive to a voltage difference applied between the actuation electrode (82) and the movable element (810) by moving in a direction generally perpendicular to the top surface (88) of the substrate (20).

L'invention porte sur un dispositif microélectromécanique (MEMS) (800) qui comprend un substrat (20) ayant une surface supérieure (88), un élément mobile (810) sur le substrat (20) et une électrode d'actionnement (82). L'élément mobile (810) comprend une couche déformable (34) et un élément réfléchissant (814) mécaniquement couplé à la couche déformable (34). L'élément réfléchissant (814) comprend une surface réfléchissante (92). L'électrode d'actionnement (82) est disposée latéralement à partir de la surface réfléchissante (92). L'élément mobile (810) est sensible à une différence de tension appliquée entre l'électrode d'actionnement (82) et l'élément mobile (810) par déplacement dans une direction généralement perpendiculaire à la surface supérieure (88) du substrat (20).

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