Microelectromechanical system sensor assembly

Details Microelectromechanical system sensor assembly Microelectromechanical system sensor assembly

G - Physics

01

F

G01F 1/684 (2006.01)

Patent

CA 2391298

A sensor assembly (100) has a substrate (102) with a microchannel (104) formed therein through which a fluid flows. At least one sensor (106) is proximate to the microchannel. The temperature of the at least one sensor or fluid indicates the condition of the fluid including the flow rate and the presence of gas bubbles and particulate substance.

L'invention concerne un ensemble capteur (100) composé d'un substrat (102) comprenant un microcanal (104) à travers lequel s'écoule un fluide. Au moins un capteur (106) est situé près du microcanal. La température du capteur ou du fluide indique la condition du fluide, comme par exemple le débit et la présence de bulles de gaz et de substance particulaire.

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