Microelectronic assemblies including z-axis conductive films

Details Microelectronic assemblies including z-axis conductive films Microelectronic assemblies including z-axis conductive films

H - Electricity

01

L

H01L 23/50 (2006.01) H01L 23/49 (2006.01) H01L 23/492 (2006.01) H01L 23/498 (2006.01) H01L 23/538 (2006.01) H01L 25/065 (2006.01) H05K 1/18 (2006.01) H05K 3/46 (2006.01)

Patent

CA 2205810

An assembly of two or more microelectronic parts, wherein electrical and/or thermal interconnection between the parts is achieved by means of multiple, discrete, conductive nanoscopic fibrils (15) or tubules (15) fixed within the pores of an insulating film (16). Such a film is said to have anisotropic electrical conductivity, i.e., Z-axis conductivity, with little or no conductivity in the other directions.

L'invention concerne un assemblage d'au moins deux éléments microélectroniques, où l'interconnexion électrique et/ou thermique entre les éléments se fait au moyen de fibrilles (15) ou tubules (15) nanoscopiques multiples, discrets et conducteurs, fixés dans les pores d'un film isolant (16). On dit qu'un tel film a une conductivité électrique anisotrope, c'est-à-dire suivant l'axe des Z, avec peu ou pas de conductivité dans les autres directions.

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