Microengineered vacuum interface for an ionization system

Details Microengineered vacuum interface for an ionization system Microengineered vacuum interface for an ionization system

H - Electricity

01

J

H01J 49/02 (2006.01) H01J 49/04 (2006.01) H01J 49/10 (2006.01) B01D 57/02 (2006.01) G01N 27/447 (2006.01) G01N 30/06 (2006.01)

Patent

CA 2590762

A planar component for interfacing an atmospheric pressure ionizer to a vacuum system is described. The component combines electrostatic optics and skimmers with an internal chamber that can be filled with a gas at a prescribed pressure and is fabricated by lithography, etching and bonding of silicon.

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