Microfabricated devices and method of manufacturing the same...

G - Physics – 03 – F

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G03F 7/00 (2006.01) B01J 19/00 (2006.01) B01L 3/00 (2006.01) B29C 67/00 (2006.01) B81B 1/00 (2006.01) B81C 1/00 (2006.01) C08J 5/00 (2006.01) G01N 31/22 (2006.01)

Patent

CA 2380075

Microfabricated devices and methods of manufacturing the devices are disclosed. The devices are manufactured from a substrate having microscale fluid channels, and polymerizing a polymerizable mixture in the channels to form stimuliresponsive operating components of the device. The operating components can be functional or structural components. The method of manufacture obviates the traditional assembly of microscale components to form a device because the microscale components are formed in situ or within the device. The microscale components are constructed from polymer gels and said polymer gels are utilized in the method to provide the microscale components.

L'invention concerne des dispositifs microfabriqués et leurs procédés de fabrication. Les dispositifs sont fabriqués dans un substrat comportant des conduits de fluide à micro-échelle, par polymérisation d'un mélange polymérisable dans les conduits pour former des composants de fonctionnement du dispositif sensibles à une excitation. Les composants de fonctionnement peuvent être fonctionnels ou structurels. Le procédé de fabrication permet d'éviter le montage classique de composants à micro-échelle pour former un dispositif, les composants à micro-échelle étant formés <i/in situ> au-dessus ou à l'intérieur du dispositif.

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