H - Electricity – 01 – L
Patent
H - Electricity
01
L
H01L 21/46 (2006.01) H01L 23/34 (2006.01)
Patent
CA 2605871
A grid structure and method for manufacturing the same. The grid is used for gating a stream of charged particles in certain types of particle measurement instruments, such as ion mobility spectrometers and the like. The methods include various microfabrication techniques for etching and/or depositing grid structure materials on a silicon substrate.
L'invention concerne une structure de grille et un procédé de fabrication associé. La grille selon l'invention est utilisée pour laisser passer un flux de particules chargées dans certains types d'instruments de mesure de particules, tels que des spectromètres de mobilité ionique et analogues. Les procédés selon l'invention comprennent diverses techniques de microfabrication permettant de graver et/ou de déposer des matériaux de structure de grille sur un substrat silicium.
Collins Scott
Frederick Brian G.
Legore Lawrence J.
Smith Rosemary
Borden Ladner Gervais Llp
Stillwater Scientific Instruments
University Of Maine
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