Microfluid ejection device having efficient logic and driver...

B - Operations – Transporting – 41 – J

Patent

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B41J 2/05 (2006.01) B41J 2/14 (2006.01) B41J 2/145 (2006.01) B41J 2/15 (2006.01) B41J 2/16 (2006.01)

Patent

CA 2545241

A semiconductor substrate (16) for a microfluid ejection head (14). The substrate includes a plurality of fluid ejection actuators (30) disposed on the substrate. A plurality of driver transistors (58) are disposed on the substrate (16) for driving the plurality of fluid ejection actuators (30). Each of the driver transistors (58) have an active area (94) ranging from about 1000 to less than about 15,000 micrometer square. A plurality of logic circuits (44) including at least one logic transistor (52) are coupled to the driver transistors (58). The driver and logic transistors are provided by a high density array of MOS transistors wherein at least the logic transistors have a gate length of from about 0.1 to less than about 3 microns.

L'invention concerne un substrat à semi-conducteurs destiné à une tête d'éjection de microfluide. Le substrat comprend une pluralité d'actionneurs d'éjection de fluide disposés sur le substrat. Une pluralité de transistors pilotes sont disposés sur le substrat afin de commander la pluralité d'actionneurs d'éjection de fluide. Chacun des transistors pilotes présente une zone active comprise entre 1000 et moins d'environ 15000 ?m2. Plusieurs circuits logiques comprenant au moins un transistor logique sont couplés aux transistors pilotes. Les transistors logiques et pilotes sont formés par un réseau haute densité de transistors MOS dans lequel au moins les transistors logiques présentent une longueur de grille comprise entre environ 0,1 et moins d'environ 3 microns.

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