Microgyroscope for determining rotational movements about an...

Details Microgyroscope for determining rotational movements about an... Microgyroscope for determining rotational movements about an...

G - Physics

01

C

G01C 19/56 (2006.01) G01P 9/04 (2006.01)

Patent

CA 2753797

The invention relates to a microgyroscope for determining rotational movements about an x and/or y and z axis, comprising a substrate, several oscillating masses (4, 5), springs for fastening the oscillating masses (4, 5) to the substrate, drive elements for vibrating at least individual ones of the masses in an oscillatory manner in the x-y plane in order to produce Coriolis forces when the substrate is rotated, and sensor elements for detecting deflections of the masses (4, 5) on account of the Coriolis forces produced. At least individual ones of the masses (4, 5) are arranged in two groups. The masses (4, 5) of both groups can be jointly induced by the drive elements to carry out an oscillating primary movement in the plane of the x-y axis. The masses (4) of the first group are arranged on the substrate in such a manner that they allow movements starting from the x-y plane. The masses (5) of the second group are arranged on the substrate in such a manner that they allow movements perpendicular to the oscillating primary movement in the plane of the x-y axis.

L'invention concerne un microgyroscope destiné à déterminer des mouvements rotatifs autour d'axes x et/ou y et z et comportant un support, plusieurs masses (4, 5) vibrantes, pourvues de ressorts pour leur fixation sur le support, des éléments d'entraînement pour mettre au moins certaines masses (4, 5) en vibration sur le plan x-y, afin de générer des forces de Coriolis lors de la rotation du support, et des éléments capteurs pour détecter des déports des masses (4, 5) dus aux forces de Coriolis générées. Au moins certaines masses (4, 5) sont disposées en deux groupes. Les masses (4, 5) des deux groupes peuvent être excitées ensemble par les éléments d'entraînement pour effectuer un mouvement primaire de vibration dans le plan des axes x/y. Les masses (4) du premier groupe sont disposées sur le support de manière à permettre des mouvements à partir des plans x/y. Les masses (5) du deuxième groupe sont disposées sur le support de manière à permettre des mouvements perpendiculaires au mouvement primaire de vibration dans le plan des axes x/y.

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