G - Physics – 05 – F
Patent
G - Physics
05
F
356/192
G05F 1/00 (2006.01) G03F 7/20 (2006.01) H01L 21/68 (2006.01)
Patent
CA 1304173
ABSTRACT This invention is directed to electro-magnetic alignment apparatus which includes a monolithic stage, a sub-stage, an isolated reference structure, force actuators interposed between the monolithic stage and the sub-stage for suspending and positioning the monolithic stage in space, sensors for sensing the position of the monolithic stage and outputting a signal to control circuitry, which compares the sensed position with a commanded stage position and outputs an error signal to the force actuator, and actuators for controlling the position of the sub-stage to follow the approximate position of the monolithic stage.
599723
Osler Hoskin & Harcourt Llp
Svg Lithography Systems Inc.
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