F - Mech Eng,Light,Heat,Weapons – 04 – B
Patent
F - Mech Eng,Light,Heat,Weapons
04
B
F04B 43/04 (2006.01)
Patent
CA 2410306
The fluid-flow device (100) of the invention comprises a stack (30) covered by a closure wafer (20), said stack (30) comprising a support wafer (36), a layer of insulating material (34), and a silicon layer (32). The closure wafer (20) and/or said silicon layer (32) are machined so as to define a cavity (38) between said closure wafer (20) and said silicon layer (32), said support wafer (36) has at least one duct (102) passing right through it, said layer of insulating material (34) presenting at least one zone (35) that is entirely free of material placed at least in line with said duct (102) so as to co-operate with said cavity (38) to define a moving member (40) in said silicon layer (32), the moving member being suitable under the pressure of liquid in said cavity (38) for reversibly moving towards said support wafer (36) until contact is made between said moving member (40) and said support wafer (36).
Le dispositif fluidique (100) selon l'invention comprend un empilement (30) recouvert d'une plaque de fermeture (20), ledit empilement (30) comportant une plaque de support (36), une couche de matériau isolant (34), et une couche de silicium (32). La plaque de fermeture (20) et/ou ladite couche de silicium (32) sont usinée(s) afin de définir, entre ladite plaque de fermeture (20) et ladite couche de silicium (32), une cavité (38), ladite plaque de support (36) comporte au moins un conduit (102) la traversant de part en part, ladite couche de matériau isolant (34) présente au moins une zone entièrement exempte de matière (35) placée au moins dans le prolongement dudit conduit (102 ), afin de définir, avec ladite cavité (38) et dans ladite couche de silicium (32), un organe mobile (40) apte, sous la pression de liquide dans ladite cavité (38), à se rapprocher, de manière réversible, de ladite plaque de support (36), jusqu'à former un contact entre ledit organe mobile (40) et ladite plaque de support (36).
Gamper Stephan
Maillefer Didier
Van Lintel Harald T.
Debiotech Sa
Sim & Mcburney
Westonbridge International Limited
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