Micromachined sensor device

Details Micromachined sensor device Micromachined sensor device

G - Physics

01

L

G01L 9/00 (2006.01) G01K 5/52 (2006.01) G01K 5/58 (2006.01) G01L 1/10 (2006.01)

Patent

CA 2133217

In a method for monitoring strain variations of a strain responsive element of a micromachined sensor device while subjected to outside parameter conditions, at least two oscillation resonance modes of said element are activated and interrogated optically. Thereby correspondingly at least two resonance frequencies are obtained. From parameter/frequency characteristics of said device correspondingly at least two parameter values are derived.

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