Micromachining process for making perfect exterior corner in...

Details Micromachining process for making perfect exterior corner in... Micromachining process for making perfect exterior corner in...

H - Electricity

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H01L 21/306 (2006.01) B44C 1/22 (2006.01) C03C 15/00 (2006.01) H01L 21/308 (2006.01) C03C 25/06 (1990.01)

Patent

CA 2133656

2133656 9419824 PCTABS00033 A process for forming a three-dimensional structure etched in a substrate (501) with perfect convex corners includes partitioning the structure into two features (502-504, 505) such that the exterior corners are formed by the intersection (506) of the two features; etching the first feature (502-504); forming an etch mask on the surface and on the substrate of the etched first feature; opening a window in the etch mask on the substrate to define the second feature; and etching the second feature (505), thereby obtaining the desired structure.

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