Micromechanical chemical sensor

Details Micromechanical chemical sensor Micromechanical chemical sensor

G - Physics

01

N

73/3, 349/37

G01N 29/02 (2006.01) G01N 27/00 (2006.01)

Patent

CA 1180914

Abstract: MICROMECHANICAL CHEMICAL SENSOR The invention is a micromechanical chemical sensor having a vibrating cantilever beam sensitized with a thin surface layer of chemically reactive material. The chemically reactive material interacts with a specific component of a gas sample increasing the mass of the cantilever beam. An oscillator circuit sustains the vibration of the cantilever beam at its natural resonance frequency. The change in the resonance frequency of the cantilever beam is indicative of the quantity of the specific component of the gas sample which has interacted with the chemically reactive surface layer.

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