Micromechanical display logic and array

Details Micromechanical display logic and array Micromechanical display logic and array

G - Physics

08

B

375/49, 345/9

G08B 5/24 (2006.01) G09F 9/37 (2006.01) H01H 59/00 (2006.01)

Patent

CA 1145022

MICROMECHANICAL DISPLAY LOGIC AND ARRAY Abstract A display device, addressing circuitry, and semiconductor control logic are all portions of an integrated structure formed by thin film technology on a single silicon wafer. The display comprises a thin film micromechanical electro- static form of light reflective display formed by depositing thin films upon a silicon wafer and selectively etching to form metal-amorphous oxide micromechanical leaves deflected by applying potential thereto to provide electrostatic deflection. MOSFET devices are also formed upon the silicon wafer in juxtaposition with a plurality of micromechanical display elements. Addressing circuitry is connected to the MOSFET devices. SA978-003

339027

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