Micromechanical modulator

G - Physics – 02 – B

Patent

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Details

G02B 26/00 (2006.01) G02B 26/02 (2006.01) G02B 26/04 (2006.01) H04J 14/02 (2006.01)

Patent

CA 2137063

A method and apparatus for modulating an optical signal using a micromechanical modulator are disclosed. The modulator comprises a membrane, which consists of at least one layer, and a substrate, spaced to form an air gap. The layers of the membrane are characterized in that there is a relationship between the refractive indices of the layers and the refractive index of the substrate. The membrane is suspended in a first position over the substrate by a flexible support arrangement. Bias is applied to the membrane and the substrate to create an electrostatic force to move the membrane towards the substrate to a second position. The reflectivity of the device to an optical signal changes as the membrane moves from the first position to the second position, thereby modulating the signal.

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