Micromechanical sensor and method for operating the sensor

G - Physics – 01 – L

Patent

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Details

G01L 27/00 (2006.01) G01D 5/24 (2006.01) G01L 9/00 (2006.01) G01L 9/12 (2006.01) G01M 17/007 (2006.01)

Patent

CA 2305317

The invention relates to a sensor (1), especially a micromechanical pressure sensor with two similar capacitive partial structures (C1, C2) which are coupled to an evaluation circuit (9, 11). In the case of in-phase control, an additive signal is provided as a pressure-dependent useful signal. In the case of opposite phase control, a differential signal is provided as a diagnostic signal.

L'invention concerne un détecteur (1), notamment un détecteur de pression micromécanique comprenant deux structures partielles capacitives (C1, C2) semblables couplées à un circuit d'évaluation (9, 11). En cas de commande en phase, on dispose d'un signal additif sous forme de signal utile fonction de la pression. En cas de commande en opposition de phase, on dispose d'un signal différentiel sous forme de signal de diagnostic.

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