Micromirror systems

G - Physics – 02 – B

Patent

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Details

G02B 26/08 (2006.01) G02B 7/182 (2006.01) G02B 17/06 (2006.01) G02B 26/12 (2006.01) G02B 27/18 (2006.01)

Patent

CA 2502298

Micromirror devices, especially for use in digital projection are disclosed. Other applications are contemplated as well. The devices employ a superstructure that includes a mirror supported over a hinge set above a substructure. Various improvements to the superstructure over known micromirror devices are provided. The features described are applicable to improve manufacturability, enable further miniaturization of the elements and/or to increase relative light return. Devices can be produced utilizing the various optional features described herein, possibly offering cost savings, lower power consumption, and higher resolution.

L'invention concerne des dispositifs à micromiroirs, utilisés en particulier pour la projection numérique, sans exclure d'autres applications. Les dispositifs font appel à une superstructure qui comporte un miroir soutenu sur une articulation placée au-dessus d'une substructure. On décrit différentes améliorations de la superstructure par rapport à des dispositifs à micromiroirs existants. Les caractéristiques présentées permettent d'améliorer la manufacturabilité, d'accentuer la miniaturisation des éléments et/ou d'améliorer la réflexion relative de la lumière. Il est possible de produire ces dispositifs en utilisant les différentes options décrites, par exemple pour réduire les coûts, diminuer la consommation d'énergie et augmenter la résolution.

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