Micropump

Details Micropump Micropump

F - Mech Eng,Light,Heat,Weapons

04

B

F04B 17/04 (2006.01) F04F 99/00 (2009.01) F04B 19/00 (2006.01) F04F 1/06 (2006.01)

Patent

CA 2761999

The invention relates to a displacement pump, constructed using microsystem technology, preferably used as a vacuum pump.

L'invention concerne une pompe de refoulement, réalisée selon la technique des microsystèmes et utilisée de préférence comme pompe à vide.

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