Microscale out-of-plane anemometer

Details Microscale out-of-plane anemometer Microscale out-of-plane anemometer

G - Physics

01

F

G01F 1/68 (2006.01) G01F 1/684 (2006.01) G01F 1/688 (2006.01) G01P 5/06 (2006.01) G01P 5/12 (2006.01)

Patent

CA 2470716

A microscale out-of-plane thermal sensor (10, 100). A resistive heater (12) is suspended over a substrate (14) by supports (16) raised with respect to the substrate to provide a clearance (20) underneath the resistive heater for fluid (22) flow. A preferred fabrication process for the thermal sensor uses surface micromachining and a three-dimensional assembly to raise the supports and lift the resistive heater over the substrate.

La présente invention concerne un capteur thermique (10, 100) de petite échelle situé hors du plan. Une résistance chauffante (12) est suspendue au-dessus d'un substrat (14) au moyen de supports (16) élevés par rapport au substrat de manière à obtenir un espace libre (20), au-dessous de la résistance chauffante, destiné à permettre l'écoulement d'un fluide (22). Un procédé de fabrication préféré du capteur thermique fait appel au micro-usinage de surface et à un ensemble tridimensionnel permettant d'élever les supports et d'élever la résistance chauffante au-dessus du substrat.

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