Microsubstrates and method for making micropattern devices

Details Microsubstrates and method for making micropattern devices Microsubstrates and method for making micropattern devices

C - Chemistry, Metallurgy

08

J

195/35

C08J 3/28 (2006.01) G06N 99/00 (2010.01) C12N 11/04 (2006.01) H01L 21/027 (2006.01) H01L 21/312 (2006.01) H01L 21/3205 (2006.01) H01L 21/768 (2006.01)

Patent

CA 1066208

ABSTRACT OF THE DISCLOSURE Micropattern devices, such as electronic microcircuits, are produced by establishing on a substrate base a film of resist material, such as a polymeric film, containing dispersed there- through a substantial proportion of an enzyme and then producing pattern of a metal by reactions depending upon presence of the enzyme.

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