Microvalve assemblies and related methods

Details Microvalve assemblies and related methods Microvalve assemblies and related methods

F - Mech Eng,Light,Heat,Weapons

15

B

F15B 11/00 (2006.01)

Patent

CA 2572293

A valve chip may include a substrate having first and second faces and openings between the first and second faces, and a plurality of flexible valve flaps on one of the faces of the substrate with each flexible valve flap being associated with at least one of the openings. The valve chip may be packaged by forming a frame having an opening therein, and securing the valve chip in the opening of the frame. More particularly, the valve chip may be secured in the opening so that central portions of the first and second faces of the substrate are exposed through the opening in the frame and so that a fluid seal is provided between the frame and edges of the substrate. Related valves, valve assemblies, and methods are also discussed.

L'invention concerne une puce de soupape, qui peut comprendre un substrat présentant une première et une seconde faces et des ouvertures, et une pluralité de volets de soupape souples ménagés sur une des faces du substrat, chaque volet de soupape souple étant associé à au moins une des ouvertures. La puce de soupape peut être mise sous boîtier par formation d'un cadre muni d'une ouverture, et par fixation de la puce de soupape dans l'ouverturre du cadre. Plus particulièrement, la puce de soupape peut être fixée dans l'ouverturre, de sorte que des parties centrales de la première et de la seconde faces du substrat soient exposées à travers l'ouverturre du cadre, et qu'un joint d'étanchéité soit disposé entre le cadre et les bords du substrat. On décrit également des soupapes, des ensembles soupapes, et des procédés associés.

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