Microwave induced plasma element sensor

Details Microwave induced plasma element sensor Microwave induced plasma element sensor

G - Physics

01

N

G01N 21/73 (2006.01)

Patent

CA 2320944

The apparatus for analyzing a sample gas includes a source of microwave energy directed onto the sample gas to create a plasma. A spectrometer is arranged to receive light from the plasma to identify different elements and/or to determine the concentration of at least one element in the sample gas. In one embodiment, an attached calibration system is provided for calibrating the output of the spectrometer. The calibration system includes a nebulizer apparatus for introducing a controlled amount of at least one element into the sample gas. The apparatus also includes structure adapted to add a swirl component to the plasma gas flow as an aid to plasma confinement. It is also preferred that a pair of electrodes contacting the sample gas be provided for igniting the plasma.

L'invention porte sur analyseur d'échantillons de gaz comportant comme source d'énergie des micro-ondes dirigées sur le gaz pour en faire un plasma. Un spectromètre recevant la lumière du plasma permet d'identifier les différents éléments et/ou de déterminer la concentration d'au moins l'un des éléments du gaz. Le système d'étalonnage comporte un nébuliseur introduisant une quantité déterminée d'un élément dans le gaz de l'échantillon. L'appareil comporte en outre une structure ajoutant un élément tourbillonnant au flux de plasma pour en maintenir le confinement. Il est préférable que la paire d'électrodes en contact avec le gaz de l'échantillon en assure l'allumage.

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