Microwave ion source

Details Microwave ion source Microwave ion source

H - Electricity

01

J

353/32

H01J 27/18 (2006.01)

Patent

CA 1238415

Abstract of the Disclosure In a microwave ion source utilizing a microwave and a magnetic field, a microwave introducing window has a multilayer structure of plates with different dielectric constants, a magnetic circuit is arranged to generate a magnetic field having a higher intensity than that defined by ECR (Electron Cyclotron Resonance) conditions so as to form a narrow high-density plasma, an ion extraction electrode has an ion extraction window whose contour falls within a center region of the narrow high-density plasma.

483559

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