Microwave plasma generating apparatus

Details Microwave plasma generating apparatus Microwave plasma generating apparatus

H - Electricity

05

H

358/25

H05H 1/18 (2006.01) H05H 1/46 (2006.01)

Patent

CA 2026046

ABSTRACT OF THE DISCLOSURE A microwave plasma generating apparatus for radiating a microwave to a source gas to produce a plasma comprises a plurality of spaced fins disposed in a path of travel of the microwave from the microwave guide to an area of origin of the plasma within the plasma generating chamber so as to lie in a direction perpendicular to the direction of an electric field of the microwave, for the purpose of locking the position at which the plasma has been produced.

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