Microwave plasma generator

Details Microwave plasma generator Microwave plasma generator

H - Electricity

01

J

358/25

H01J 7/24 (2006.01) H01J 37/32 (2006.01) H05H 1/46 (2006.01)

Patent

CA 1286427

For: Microwave Plasma Generator ABSTRACT OF DISCLOSURE A microwave plasma generator for producing an axisymmetric plasma, having a waveguide apparatus, means for introducing a microwave source into the waveguide apparatus, and means for generating a circular axisymmetric microwave field from the microwave source. There are means for tuning the field to match the impedance of a plasma load. Further included is a vacuum chamber for containing a gas to be ionized to form the plasma, means for introducing this gas into the vacuum chamber, and means for coupling the microwave field to the vacuum chamber to form the plasma.

568563

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