H - Electricity – 05 – H
Patent
H - Electricity
05
H
H05H 1/46 (2006.01) H05H 1/24 (2006.01)
Patent
CA 2572391
Systems and methods for generating microwave plasma are disclosed. The present invention provides a microwave plasma nozzle (26) that includes a gas flow tube (40), and a rod-shaped conductor (34) that is disposed in the gas flow tube (40) and has a tip (33) near the outlet of the gas flow tube (40). A portion (35) of the rod-shaped conductor (34) extends into a microwave cavity (24) to receive microwaves passing in the cavity (24). These received microwaves are focused at the tip (33) to heat the gas into plasma. The microwave plasma nozzle (26) also includes a vortex guide (36) between the rod- shaped conductor (34) and the gas flow tube (40) imparting a helical shaped flow direction to the gas flowing through the tube (40). The microwave plasma nozzle (26) further includes a shielding mechanism (108) for reducing a microwave power loss through the gas flow tube (40).
L'invention concerne des systèmes et des procédés pour la production de plasma par micro-ondes. On décrit une buse de production de ce plasma (26) qui comprend un tube d'écoulement de gaz (40), et un conducteur en forme de tige (34) dans ledit tube 40) ayant une extrémité (33) proche de la sortie du tube (40). Une partie (35) du conducteur (34) s'étend dans une cavité à micro-ondes (24) pour la réception des micro-ondes qui traversent la cavité (24). Ces micro-ondes reçues sont concentrées sur l'extrémité (33) pour l'échauffement du gaz dans le plasma. La buse (26) comprend aussi un guide à vortex (36) entre le conducteur (34) et le tube (40) pour donner une orientation d'écoulement en vortex au gaz qui s'écoule dans le tube (40). La buse comprend (26) encore un blindage (108) qui réduit la perte de puissance des micro-ondes à travers le tube (40).
Kim Jay Joongsoo
Lee Sang Hun
Amarante Technologies Inc
Noritsu Koki Co. Ltd.
Riches Mckenzie & Herbert Llp
Saian Corporation
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