Miniaturized spring element and method for producing the latter

Details Miniaturized spring element and method for producing the latter Miniaturized spring element and method for producing the latter

G - Physics

01

D

G01D 5/02 (2006.01) G01Q 60/24 (2010.01) G01Q 60/40 (2010.01) B81B 3/00 (2006.01) B82B 1/00 (2006.01) C12M 1/34 (2006.01) C12Q 1/00 (2006.01) G01N 5/00 (2006.01)

Patent

CA 2640702

A miniaturized spring element (1, 1') is intended to be particularly suitable for use as a beam probe or cantilever (2) for detecting atomic or molecular forces, in particular in an atomic force microscope (22), and, to this end, is intended to make it possible to detect its deflection in a particularly reliable manner and with high resolution. For this purpose, according to the invention, the spring element (1, 1') comprises a basic body (4) which is formed from a matrix containing embedded nanoparticles (14) or defects. The spring element (1, 1') is produced using the principle of local deposition with focussed energetic particles or electromagnetic waves or by pyrolytically induced deposition.

L'invention concerne un élément élastique miniaturisé (1, 1') destiné en particulier à être utilisé comme sonde en poutre ou porte-à-faux (2) pour la détection de forces atomiques ou moléculaires, en particulier dans un microscope à balayage (22), et qui permet alors une détection particulièrement fiable et à résolution particulièrement élevée de ses déviations. Dans ce but, l'élément élastique (1, 1') comprend selon l'invention un corps de base (4) constitué d'une matrice dans laquelle des nanoparticules (14) ou des défauts sont incorporés. L'élément élastique (1, 1') est fabriqué en recourant au principe du dépôt local de particules énergétiques concentrées, d'ondes électromagnétiques ou du dépôt induit par pyrolyse.

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