Mirror and mirror layer for optical modulator and method

Details Mirror and mirror layer for optical modulator and method Mirror and mirror layer for optical modulator and method

G - Physics

02

B

G02B 26/00 (2006.01) B81B 3/00 (2006.01) G02B 26/08 (2006.01)

Patent

CA 2581936

Described herein are systems, devices, and methods relating to packaging electronic devices, for example, microelectromechanical systems (MEMS) devices, including optical modulators such as interferometric optical modulators. The interferometric modulator disclosed herein comprises a movable mirror. Some embodiments of the disclosed movable mirror exhibit a combination of improved properties compared to known mirrors, including reduced moving mass, improved mechanical properties, and reduced etch times.

Cette invention concerne des systèmes, dispositifs et procédés relatifs au conditionnement de dispositifs électroniques tels que des microdispositifs électromécaniques (MEMS) dont des modulateurs optiques, par exemple des modulateurs optiques à interféromètre. Ce dernier modulateur comprend un miroir mobile. Dans certains modes de réalisation, ledit miroir présente une combinaison de caractéristiques améliorées par rapport à des miroirs connus, dont une moindre masse mobile, des propriétés mécaniques améliorées et des temps de gravure réduits.

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