Mixed phase electron beam evaporator

Details Mixed phase electron beam evaporator Mixed phase electron beam evaporator

H - Electricity

01

J

327/7

H01J 37/305 (2006.01) B01D 1/00 (2006.01) B01D 59/34 (2006.01)

Patent

CA 1052448

A B S T R A C T Apparatus for reducing convection current heat loss in an electron beam evaporator. A material to be evaporated (evaporant) is placed in the crucible of an electron beam evaporation source along with a porous mass formed of a powdered or finely divided solid to act as an impedance to convection currents. A feed system is employed to replenish the supply of evaporant as it is vaporized.

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